Statistical Metrology Group

Prof. Duane S. Boning

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Prof. Duane S. Boning
Publications

Comparison of Oxide Planarization Pattern Dependencies between Two Different CMP Tools Using Statistical Metrology

MIT Vice Provost for International Activities (VPIA), effective Sept. 1

Engineering Faculty Co-Director of the Leaders for Global Operations (LGO) Program

Associate Director, Computation

News

Duane Boning named vice provost for international activities
Duane Boning received the EECS Burgess (1952) & Elizabeth Jamieson Award
Duane Boning named head of Leaders for Global Operations program
Duane Boning named LeBel Professor

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