Statistical Metrology Group

Prof. Duane S. Boning

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Prof. Duane S. Boning
Publications

Overview of Methods for Characterization of Pattern Dependencies in Copper CMP

Engineering Faculty Co-Director of the Leaders for Global Operations (LGO) Program

Associate Director, Computation

News

Duane Boning named head of Leaders for Global Operations program
Duane Boning named LeBel Professor

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